Please use this identifier to cite or link to this item:
http://dx.doi.org/10.25673/6164| Title: | Bestimmung organischer Kontaminationen auf Waferoberflächen |
| Author(s): | Hernsdorf, Anne |
| Referee(s): | Prof. Dr. rer. nat. Cepus, Valentin |
| Granting Institution: | Hochschule Merseburg |
| Issue Date: | 2015 |
| Type: | Hochschulschrift |
| Type: | Master thesis |
| Language: | German |
| Publisher: | Hochschulbibliothek, Hochschule Merseburg |
| URN: | urn:nbn:de:gbv:542-1838 |
| URI: | https://opendata.uni-halle.de//handle/1981185920/12975 http://dx.doi.org/10.25673/6164 |
| Open Access: |  Open access publication |
| Appears in Collections: | Ingenieur- und Naturwissenschaften |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| HernsdorfAnne_Bestimmung_organischer_Kontaminationen_Waferoberflächen.pdf | 2.67 MB | Adobe PDF |  View/Open |