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Please use this identifier to cite or link to this item: http://dx.doi.org/10.25673/4989
Title: Physikalische Vorgänge in gepulsten Magnetronentladungen
Other Titles: Physical processes in pulsed magnetron discharges
Author(s): Schulze, Matthias
Granting Institution: Otto-von-Guericke-Universität Magdeburg
Issue Date: 2001
Extent: Online-Ressource (PDF-Datei: 147 S., 5069 KB)
Type: Hochschulschrift
Language: German
Publisher: Universitätsbibliothek
Otto von Guericke University Library, Magdeburg, Germany
URN: urn:nbn:de:101:1-201010122213
Subjects: Hochschulschrift
URI: https://opendata.uni-halle.de//handle/1981185920/11031
http://dx.doi.org/10.25673/4989
Open access: Open access publication
Appears in Collections:Fakultät für Naturwissenschaften

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