Please use this identifier to cite or link to this item:
http://dx.doi.org/10.25673/6164
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.referee | Prof. Dr. rer. nat. Cepus, Valentin | |
dc.contributor.author | Hernsdorf, Anne | |
dc.date.accessioned | 2018-09-24T19:09:27Z | - |
dc.date.available | 2018-09-24T19:09:27Z | - |
dc.date.issued | 2015 | |
dc.identifier.uri | https://opendata.uni-halle.de//handle/1981185920/12975 | - |
dc.identifier.uri | http://dx.doi.org/10.25673/6164 | - |
dc.language.iso | ger | - |
dc.publisher | Hochschulbibliothek, Hochschule Merseburg | |
dc.subject.ddc | 543 | - |
dc.subject.ddc | 547 | - |
dc.title | Bestimmung organischer Kontaminationen auf Waferoberflächen | |
dcterms.type | Hochschulschrift | |
dc.type | Master Thesis | |
dc.identifier.urn | urn:nbn:de:gbv:542-1838 | |
local.publisher.universityOrInstitution | Hochschule Merseburg | |
local.openaccess | true | - |
Appears in Collections: | Ingenieur- und Naturwissenschaften |
Files in This Item:
File | Description | Size | Format | |
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HernsdorfAnne_Bestimmung_organischer_Kontaminationen_Waferoberflächen.pdf | 2.67 MB | Adobe PDF | View/Open |