Please use this identifier to cite or link to this item:
http://dx.doi.org/10.25673/3882Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Fuchs, Henning | |
| dc.date.accessioned | 2018-09-24T16:14:39Z | - |
| dc.date.available | 2018-09-24T16:14:39Z | - |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://opendata.uni-halle.de//handle/1981185920/10597 | - |
| dc.identifier.uri | http://dx.doi.org/10.25673/3882 | - |
| dc.description.statementofresponsibility | von Henning Fuchs | |
| dc.format.extent | Online-Ressource (PDF-Datei: 149 S., 5785 KB) | |
| dc.language.iso | ger | |
| dc.publisher | Universitätsbibliothek | |
| dc.publisher | Otto von Guericke University Library, Magdeburg, Germany | |
| dc.subject | Hochschulschrift | |
| dc.subject | Online-Publikation | |
| dc.title | Untersuchungen zur ionenstromangepassten Prozessführung und zu Verfahrensvarianten im gepulsten Vakuumbogen-Beschichtungsprozess | |
| dc.title.alternative | Investigations on ion current adapted processing and process modifications in a pulsed vacuum arc deposition process | |
| dcterms.type | Hochschulschrift | |
| dc.type | PhDThesis | - |
| dc.identifier.urn | urn:nbn:de:101:1-201010123141 | |
| local.publisher.universityOrInstitution | Otto-von-Guericke-Universität Magdeburg | |
| local.subject.keywords | Vacuum arc, deposition, ion current, plasma properties, power electronics, bias voltage | |
| local.openaccess | true | - |
| Appears in Collections: | Fakultät für Elektrotechnik und Informationstechnik | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| henfuchs.pdf | 5.78 MB | Adobe PDF |  View/Open |