Please use this identifier to cite or link to this item:
http://dx.doi.org/10.25673/3882
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Fuchs, Henning | |
dc.date.accessioned | 2018-09-24T16:14:39Z | - |
dc.date.available | 2018-09-24T16:14:39Z | - |
dc.date.issued | 2004 | |
dc.identifier.uri | https://opendata.uni-halle.de//handle/1981185920/10597 | - |
dc.identifier.uri | http://dx.doi.org/10.25673/3882 | - |
dc.description.statementofresponsibility | von Henning Fuchs | |
dc.format.extent | Online-Ressource (PDF-Datei: 149 S., 5785 KB) | |
dc.language.iso | ger | |
dc.publisher | Universitätsbibliothek | |
dc.publisher | Otto von Guericke University Library, Magdeburg, Germany | |
dc.subject | Hochschulschrift | |
dc.subject | Online-Publikation | |
dc.title | Untersuchungen zur ionenstromangepassten Prozessführung und zu Verfahrensvarianten im gepulsten Vakuumbogen-Beschichtungsprozess | |
dc.title.alternative | Investigations on ion current adapted processing and process modifications in a pulsed vacuum arc deposition process | |
dcterms.type | Hochschulschrift | |
dc.type | PhDThesis | - |
dc.identifier.urn | urn:nbn:de:101:1-201010123141 | |
local.publisher.universityOrInstitution | Otto-von-Guericke-Universität Magdeburg | |
local.subject.keywords | Vacuum arc, deposition, ion current, plasma properties, power electronics, bias voltage | |
local.openaccess | true | - |
Appears in Collections: | Fakultät für Elektrotechnik und Informationstechnik |
Files in This Item:
File | Description | Size | Format | |
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henfuchs.pdf | 5.78 MB | Adobe PDF | ![]() View/Open |