Please use this identifier to cite or link to this item: http://dx.doi.org/10.25673/4217
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dc.contributor.refereeBurte, Edmund
dc.contributor.authorYeh, Chia-Pin
dc.date.accessioned2018-09-24T18:00:41Z-
dc.date.available2018-09-24T18:00:41Z-
dc.date.issued2015
dc.identifier.urihttps://opendata.uni-halle.de//handle/1981185920/11933-
dc.identifier.urihttp://dx.doi.org/10.25673/4217-
dc.description.statementofresponsibilityvon Chia-Pin Yeh
dc.format.extentOnline Ressource (PDF-Datei: VIII, 149 S.)
dc.language.isoeng
dc.publisherUniversitätsbibl.
dc.publisherOtto von Guericke University Library, Magdeburg, Germany
dc.subject.ddc620-
dc.subject.ddc530-
dc.titleFabrication and investigation of three-dimensional ferroelectric capacitors for the application of FeRAM
dcterms.typeHochschulschrift
dc.typePhDThesis-
dc.identifier.urnurn:nbn:de:gbv:ma9:1-6072
local.publisher.universityOrInstitutionOtto-von-Guericke-Universität Magdeburg
local.openaccesstrue-
Appears in Collections:Fakultät für Elektrotechnik und Informationstechnik

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