Please use this identifier to cite or link to this item:
http://dx.doi.org/10.25673/4460| Title: | Plasma-assisted atomic layer deposition for microelectronics applications |
| Author(s): | Amusan, Akinwumi Abimbola |
| Referee(s): | Burte, Edmund P. Edelmann, Frank T. |
| Granting Institution: | Otto-von-Guericke-Universität Magdeburg |
| Issue Date: | 2016 |
| Extent: | 1 Online-Ressource (PDF-Datei: xviii, 170 Blätter, 28,64 MB) |
| Type: | Hochschulschrift |
| Type: | PhDThesis |
| Language: | English |
| Publisher: | Otto von Guericke University Library, Magdeburg, Germany |
| URN: | urn:nbn:de:gbv:ma9:1-8379 |
| URI: | https://opendata.uni-halle.de//handle/1981185920/12174 http://dx.doi.org/10.25673/4460 |
| Open Access: |  Open access publication |
| Appears in Collections: | Fakultät für Elektrotechnik und Informationstechnik |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Akinwumi_Amusan_PhD_thesis.pdf | 29.32 MB | Adobe PDF |  View/Open |