Please use this identifier to cite or link to this item: http://dx.doi.org/10.25673/115382
Title: Modeling, properties, and fabrication of a micromachined thermoelectric generator
Author(s): Uebensee, Hartmut
Reiche, Manfred
Kosina, HansLook up in the Integrated Authority File of the German National Library
Xu, Xuemei
Leipner, Hartmut S.Look up in the Integrated Authority File of the German National Library
Brokmann, Geert
Schwartz, Bernhard EwaldLook up in the Integrated Authority File of the German National Library
Reinhardt, AnnaLook up in the Integrated Authority File of the German National Library
Ortlepp, ThomasLook up in the Integrated Authority File of the German National Library
Issue Date: 2024
Type: Article
Language: English
Abstract: Different electrical and thermoelectric properties of a Si-based thermoelectric generator (TEG) are described based on the Kubo–Greenwood formalism. Temperature and doping dependence, phonon scattering (acoustic and optical phonons), and scattering on impurities are included. Comparisons with experimentally verified data confirm the validity of the model. Experimental studies were carried out on a micromechanically fabricated TEG. Devices were realized using a standard CMOS SOI technology in a lateral geometry. All thermopiles are located on a thin membrane to reduce the heat flow. The thickness of the membrane was adjusted between 20 and 30 µm ensuring also sufficient mechanical stability. Measurements on individual devices confirm the results of the theoretical model. The Seebeck coefficient was calculated and experimentally measured as S = 0.5 mV/K at an acceptor level of 1019 cm−3 at room temperature. The power factor is S2 · σ = 0.0073 W/mK2.
URI: https://opendata.uni-halle.de//handle/1981185920/117336
http://dx.doi.org/10.25673/115382
Open Access: Open access publication
License: (CC BY 4.0) Creative Commons Attribution 4.0(CC BY 4.0) Creative Commons Attribution 4.0
Journal Title: AIP Advances
Publisher: American Inst. of Physics
Publisher Place: New York, NY
Volume: 14
Original Publication: 10.1063/5.0179769
Page Start: 015165
Page End: 1-015165-8
Appears in Collections:Open Access Publikationen der MLU

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